Secondary Ion Mass-Spectrometer IMS-3f
Ion sources – O2+, Ar+, O-;
Primary ion beam energy – 3 to 17.5 kV;
Primary ion beam current (for O2+ source) – up to 1.3 µm;
Minimum primary ion beam diameter – about 1 ;
Primary ion beam raster size - up to 500 µm x 500 µm;
Secondary ion polarity – negative and positive;
Mass-resolution – up to 30 000;
Sensitivity – from 100 % down to subppb level.
Types of researches, which we provide:
Spot and raster element analysis;
Spot and raster isotopic analysis;
Secondary ion enrgy distribution analysis.