Secondary Ion Mass-Spectrometer IMS-3f
(CAMECA, France)

Specification:

Ion sources O2+, Ar+, O-;
Primary ion beam energy 3 to 17.5 kV;
Primary ion beam current (for O2+ source) up to 1.3 µm;
Minimum primary ion beam diameter about 1 ;
Primary ion beam raster size - up to 500 µm x 500 µm;
Secondary ion polarity negative and positive;
Mass-resolution up to 30 000;
Sensitivity from 100 % down to subppb level.

Types of researches, which we provide:

Spot and raster element analysis;
Spot and raster isotopic analysis;
Line profiling;
Ion mass-mapping;
Depth profiling;
Secondary ion enrgy distribution analysis.

Secondary Ion Mass-Spectrometer IMS-3f
(CAMECA, France)